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1.906000e-15	5.256913e-15	8.607826e-15	1.195874e-14	1.530965e-14	1.866057e-14	2.201148e-14	2.536239e-14	4.575833e-14	8.319928e-14	1.206402e-13	1.580812e-13	1.955221e-13	2.329631e-13	2.704041e-13	3.078450e-13	6.882199e-13	1.068595e-12	1.448970e-12	1.829344e-12	2.209719e-12	2.590094e-12	2.970469e-12	4.880244e-12	8.319420e-12	1.175860e-11	1.519777e-11	1.863695e-11	2.207612e-11	2.551530e-11	2.895448e-11	5.467071e-11	8.038694e-11	1.061032e-10	1.318194e-10	1.575356e-10	2.759548e-10	3.943740e-10	5.127932e-10	6.312124e-10	7.496316e-10	1.197850e-09	1.646069e-09	2.359357e-09	3.337714e-09	4.316072e-09	6.388518e-09	8.460965e-09	1.158311e-08	1.575496e-08	1.992680e-08	2.714357e-08	3.635608e-08	4.790575e-08	6.214309e-08	7.942774e-08	1.014107e-07	1.274682e-07	1.581822e-07	1.937001e-07	2.336577e-07	2.784548e-07	3.276518e-07	3.809684e-07	4.381212e-07	4.988510e-07	5.629012e-07	6.299153e-07	6.992252e-07	7.695235e-07	8.384511e-07	9.021584e-07	9.549133e-07	9.900041e-07	1.000340e-06	9.799378e-07	9.258465e-07	8.397554e-07	7.285142e-07	6.030646e-07	4.759796e-07	3.585233e-07	2.583958e-07	1.789159e-07	1.196202e-07	7.765550e-08	4.922510e-08	3.062867e-08	1.879413e-08	1.141848e-08	6.892461e-09	4.146065e-09	2.492645e-09	1.502570e-09	9.118600e-10	5.604537e-10	3.523099e-10	2.304032e-10	1.614374e-10	1.268291e-10	1.194775e-10	1.268291e-10	1.614374e-10	2.304032e-10	3.523099e-10	5.604537e-10	9.118600e-10	1.502570e-09	2.492645e-09	4.146065e-09	6.892461e-09	1.141848e-08	1.879413e-08	3.062867e-08	4.922510e-08	7.765550e-08	1.196202e-07	1.789159e-07	2.583958e-07	3.585233e-07	4.759796e-07	6.030646e-07	7.285142e-07	8.397554e-07	9.258465e-07	9.799378e-07	1.000340e-06	9.900041e-07	9.549133e-07	9.021584e-07	8.384511e-07	7.695235e-07	6.992252e-07	6.299153e-07	5.629012e-07	4.988510e-07	4.381212e-07	3.809684e-07	3.276518e-07	2.784548e-07	2.336577e-07	1.937001e-07	1.581822e-07	1.274682e-07	1.014107e-07	7.942774e-08	6.214309e-08	4.790575e-08	3.635608e-08	2.714357e-08	1.992680e-08	1.575496e-08	1.158311e-08	8.460965e-09	6.388518e-09	4.316072e-09	3.337714e-09	2.359357e-09	1.646069e-09	1.197850e-09	7.496316e-10	6.312124e-10	5.127932e-10	3.943740e-10	2.759548e-10	1.575356e-10	1.318194e-10	1.061032e-10	8.038694e-11	5.467071e-11	2.895448e-11	2.551530e-11	2.207612e-11	1.863695e-11	1.519777e-11	1.175860e-11	8.319420e-12	4.880244e-12	2.970469e-12	2.590094e-12	2.209719e-12	1.829344e-12	1.448970e-12	1.068595e-12	6.882199e-13	3.078450e-13	2.704041e-13	2.329631e-13	1.955221e-13	1.580812e-13	1.206402e-13	8.319928e-14	4.575833e-14	2.536239e-14	2.201148e-14	1.866057e-14	1.530965e-14	1.195874e-14	8.607826e-15	5.256913e-15	1.906000e-15	
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4.874750e-17	1.296659e-16	2.105842e-16	2.915026e-16	3.724209e-16	4.533393e-16	5.342576e-16	6.151760e-16	1.083576e-15	1.939459e-15	2.795341e-15	3.651223e-15	4.507106e-15	5.362988e-15	6.218870e-15	7.074753e-15	1.531077e-14	2.354679e-14	3.178281e-14	4.001883e-14	4.825485e-14	5.649087e-14	6.472689e-14	1.041981e-13	1.749044e-13	2.456108e-13	3.163171e-13	3.870234e-13	4.577298e-13	5.284361e-13	5.991425e-13	1.096804e-12	1.594465e-12	2.092127e-12	2.589788e-12	3.087449e-12	5.245983e-12	7.404518e-12	9.563052e-12	1.172159e-11	1.388012e-11	2.146829e-11	2.905647e-11	4.068615e-11	5.635734e-11	7.202853e-11	1.034097e-10	1.347910e-10	1.803723e-10	2.401539e-10	2.999354e-10	3.977617e-10	5.197250e-10	6.694194e-10	8.505434e-10	1.066900e-09	1.336715e-09	1.653663e-09	2.026249e-09	2.460057e-09	2.955689e-09	3.529003e-09	4.188067e-09	4.949135e-09	5.835448e-09	6.879236e-09	8.123134e-09	9.619986e-09	1.142925e-08	1.360732e-08	1.618849e-08	1.914535e-08	2.234923e-08	2.555391e-08	2.837528e-08	3.033369e-08	3.096301e-08	2.996616e-08	2.735306e-08	2.348002e-08	1.895297e-08	1.443725e-08	1.043642e-08	7.211012e-09	4.800502e-09	3.103733e-09	1.963167e-09	1.222406e-09	7.531297e-10	4.610466e-10	2.813397e-10	1.715664e-10	1.048133e-10	6.432913e-11	3.981578e-11	2.499613e-11	1.607041e-11	1.075698e-11	7.707230e-12	6.160096e-12	5.829751e-12	6.160096e-12	7.707230e-12	1.075698e-11	1.607041e-11	2.499613e-11	3.981578e-11	6.432913e-11	1.048133e-10	1.715664e-10	2.813397e-10	4.610466e-10	7.531297e-10	1.222406e-09	1.963167e-09	3.103733e-09	4.800502e-09	7.211012e-09	1.043642e-08	1.443725e-08	1.895297e-08	2.348002e-08	2.735306e-08	2.996616e-08	3.096301e-08	3.033369e-08	2.837528e-08	2.555391e-08	2.234923e-08	1.914535e-08	1.618849e-08	1.360732e-08	1.142925e-08	9.619986e-09	8.123134e-09	6.879236e-09	5.835448e-09	4.949135e-09	4.188067e-09	3.529003e-09	2.955689e-09	2.460057e-09	2.026249e-09	1.653663e-09	1.336715e-09	1.066900e-09	8.505434e-10	6.694194e-10	5.197250e-10	3.977617e-10	2.999354e-10	2.401539e-10	1.803723e-10	1.347910e-10	1.034097e-10	7.202853e-11	5.635734e-11	4.068615e-11	2.905647e-11	2.146829e-11	1.388012e-11	1.172159e-11	9.563052e-12	7.404518e-12	5.245983e-12	3.087449e-12	2.589788e-12	2.092127e-12	1.594465e-12	1.096804e-12	5.991425e-13	5.284361e-13	4.577298e-13	3.870234e-13	3.163171e-13	2.456108e-13	1.749044e-13	1.041981e-13	6.472689e-14	5.649087e-14	4.825485e-14	4.001883e-14	3.178281e-14	2.354679e-14	1.531077e-14	7.074753e-15	6.218870e-15	5.362988e-15	4.507106e-15	3.651223e-15	2.795341e-15	1.939459e-15	1.083576e-15	6.151760e-16	5.342576e-16	4.533393e-16	3.724209e-16	2.915026e-16	2.105842e-16	1.296659e-16	4.874750e-17	
2.296623e-17	6.047631e-17	9.798639e-17	1.354965e-16	1.730065e-16	2.105166e-16	2.480267e-16	2.855368e-16	5.005076e-16	8.929392e-16	1.285371e-15	1.677802e-15	2.070234e-15	2.462665e-15	2.855097e-15	3.247528e-15	6.982793e-15	1.071806e-14	1.445332e-14	1.818859e-14	2.192385e-14	2.565912e-14	2.939438e-14	4.713273e-14	7.887416e-14	1.106156e-13	1.423570e-13	1.740985e-13	2.058399e-13	2.375813e-13	2.693227e-13	4.900849e-13	7.108471e-13	9.316092e-13	1.152371e-12	1.373134e-12	2.319553e-12	3.265973e-12	4.212392e-12	5.158812e-12	6.105231e-12	9.384961e-12	1.266469e-11	1.765646e-11	2.436028e-11	3.106410e-11	4.435028e-11	5.763646e-11	7.681044e-11	1.018722e-10	1.269340e-10	1.675581e-10	2.180122e-10	2.797357e-10	3.542160e-10	4.429886e-10	5.534617e-10	6.831819e-10	8.358304e-10	1.014095e-09	1.218697e-09	1.457209e-09	1.734215e-09	2.058336e-09	2.441930e-09	2.902276e-09	3.462647e-09	4.152813e-09	5.008075e-09	6.065344e-09	7.354152e-09	8.873491e-09	1.057463e-08	1.234145e-08	1.397472e-08	1.520785e-08	1.576370e-08	1.544522e-08	1.422389e-08	1.227418e-08	9.928758e-09	7.560589e-09	5.454159e-09	3.757528e-09	2.493917e-09	1.608342e-09	1.015566e-09	6.318813e-10	3.893637e-10	2.385481e-10	1.457739e-10	8.907904e-11	5.456045e-11	3.358701e-11	2.085824e-11	1.314292e-11	8.483203e-12	5.701725e-12	4.101342e-12	3.287976e-12	3.114154e-12	3.287976e-12	4.101342e-12	5.701725e-12	8.483203e-12	1.314292e-11	2.085824e-11	3.358701e-11	5.456045e-11	8.907904e-11	1.457739e-10	2.385481e-10	3.893637e-10	6.318813e-10	1.015566e-09	1.608342e-09	2.493917e-09	3.757528e-09	5.454159e-09	7.560589e-09	9.928758e-09	1.227418e-08	1.422389e-08	1.544522e-08	1.576370e-08	1.520785e-08	1.397472e-08	1.234145e-08	1.057463e-08	8.873491e-09	7.354152e-09	6.065344e-09	5.008075e-09	4.152813e-09	3.462647e-09	2.902276e-09	2.441930e-09	2.058336e-09	1.734215e-09	1.457209e-09	1.218697e-09	1.014095e-09	8.358304e-10	6.831819e-10	5.534617e-10	4.429886e-10	3.542160e-10	2.797357e-10	2.180122e-10	1.675581e-10	1.269340e-10	1.018722e-10	7.681044e-11	5.763646e-11	4.435028e-11	3.106410e-11	2.436028e-11	1.765646e-11	1.266469e-11	9.384961e-12	6.105231e-12	5.158812e-12	4.212392e-12	3.265973e-12	2.319553e-12	1.373134e-12	1.152371e-12	9.316092e-13	7.108471e-13	4.900849e-13	2.693227e-13	2.375813e-13	2.058399e-13	1.740985e-13	1.423570e-13	1.106156e-13	7.887416e-14	4.713273e-14	2.939438e-14	2.565912e-14	2.192385e-14	1.818859e-14	1.445332e-14	1.071806e-14	6.982793e-15	3.247528e-15	2.855097e-15	2.462665e-15	2.070234e-15	1.677802e-15	1.285371e-15	8.929392e-16	5.005076e-16	2.855368e-16	2.480267e-16	2.105166e-16	1.730065e-16	1.354965e-16	9.798639e-17	6.047631e-17	2.296623e-17	
1.077880e-17	2.803660e-17	4.529441e-17	6.255222e-17	7.981002e-17	9.706783e-17	1.143256e-16	1.315834e-16	2.295284e-16	4.081607e-16	5.867929e-16	7.654251e-16	9.440573e-16	1.122689e-15	1.301322e-15	1.479954e-15	3.161830e-15	4.843706e-15	6.525581e-15	8.207457e-15	9.889333e-15	1.157121e-14	1.325308e-14	2.116846e-14	3.531733e-14	4.946620e-14	6.361507e-14	7.776394e-14	9.191281e-14	1.060617e-13	1.202106e-13	2.174639e-13	3.147173e-13	4.119707e-13	5.092241e-13	6.064775e-13	1.018646e-12	1.430815e-12	1.842984e-12	2.255153e-12	2.667322e-12	4.075636e-12	5.483949e-12	7.613046e-12	1.046293e-11	1.331281e-11	1.890471e-11	2.449662e-11	3.251694e-11	4.296570e-11	5.341445e-11	7.020068e-11	9.097522e-11	1.163146e-10	1.468179e-10	1.831065e-10	2.281958e-10	2.811435e-10	3.435448e-10	4.166746e-10	5.010316e-10	6.001834e-10	7.165624e-10	8.545670e-10	1.020537e-09	1.223433e-09	1.475551e-09	1.793080e-09	2.196081e-09	2.707097e-09	3.346850e-09	4.121957e-09	5.016913e-09	5.978872e-09	6.906151e-09	7.652386e-09	8.055292e-09	7.988879e-09	7.419212e-09	6.431102e-09	5.208634e-09	3.960644e-09	2.848168e-09	1.954488e-09	1.292218e-09	8.307039e-10	5.233857e-10	3.252850e-10	2.004166e-10	1.228761e-10	7.518665e-11	4.602720e-11	2.825714e-11	1.744281e-11	1.086617e-11	6.870439e-12	4.451075e-12	3.003271e-12	2.168361e-12	1.743309e-12	1.652399e-12	1.743309e-12	2.168361e-12	3.003271e-12	4.451075e-12	6.870439e-12	1.086617e-11	1.744281e-11	2.825714e-11	4.602720e-11	7.518665e-11	1.228761e-10	2.004166e-10	3.252850e-10	5.233857e-10	8.307039e-10	1.292218e-09	1.954488e-09	2.848168e-09	3.960644e-09	5.208634e-09	6.431102e-09	7.419212e-09	7.988879e-09	8.055292e-09	7.652386e-09	6.906151e-09	5.978872e-09	5.016913e-09	4.121957e-09	3.346850e-09	2.707097e-09	2.196081e-09	1.793080e-09	1.475551e-09	1.223433e-09	1.020537e-09	8.545670e-10	7.165624e-10	6.001834e-10	5.010316e-10	4.166746e-10	3.435448e-10	2.811435e-10	2.281958e-10	1.831065e-10	1.468179e-10	1.163146e-10	9.097522e-11	7.020068e-11	5.341445e-11	4.296570e-11	3.251694e-11	2.449662e-11	1.890471e-11	1.331281e-11	1.046293e-11	7.613046e-12	5.483949e-12	4.075636e-12	2.667322e-12	2.255153e-12	1.842984e-12	1.430815e-12	1.018646e-12	6.064775e-13	5.092241e-13	4.119707e-13	3.147173e-13	2.174639e-13	1.202106e-13	1.060617e-13	9.191281e-14	7.776394e-14	6.361507e-14	4.946620e-14	3.531733e-14	2.116846e-14	1.325308e-14	1.157121e-14	9.889333e-15	8.207457e-15	6.525581e-15	4.843706e-15	3.161830e-15	1.479954e-15	1.301322e-15	1.122689e-15	9.440573e-16	7.654251e-16	5.867929e-16	4.081607e-16	2.295284e-16	1.315834e-16	1.143256e-16	9.706783e-17	7.981002e-17	6.255222e-17	4.529441e-17	2.803660e-17	1.077880e-17	
5.049975e-18	1.293143e-17	2.081288e-17	2.869434e-17	3.657579e-17	4.445724e-17	5.233870e-17	6.022015e-17	1.045347e-16	1.852822e-16	2.660297e-16	3.467773e-16	4.275248e-16	5.082724e-16	5.890199e-16	6.697675e-16	1.421865e-15	2.173962e-15	2.926060e-15	3.678157e-15	4.430254e-15	5.182352e-15	5.934449e-15	9.442815e-15	1.570745e-14	2.197209e-14	2.823672e-14	3.450136e-14	4.076599e-14	4.703063e-14	5.329526e-14	9.585883e-14	1.384224e-13	1.809860e-13	2.235495e-13	2.661131e-13	4.444777e-13	6.228423e-13	8.012069e-13	9.795716e-13	1.157936e-12	1.758978e-12	2.360021e-12	3.262787e-12	4.467278e-12	5.671770e-12	8.012437e-12	1.035311e-11	1.369059e-11	1.802489e-11	2.235919e-11	2.926410e-11	3.778182e-11	4.814352e-11	6.059089e-11	7.537617e-11	9.372889e-11	1.152907e-10	1.407537e-10	1.707154e-10	2.054676e-10	2.466731e-10	2.955707e-10	3.543469e-10	4.261767e-10	5.156035e-10	6.289794e-10	7.748975e-10	9.644260e-10	1.210743e-09	1.527021e-09	1.920593e-09	2.388571e-09	2.908022e-09	3.427877e-09	3.868520e-09	4.135873e-09	4.151187e-09	3.885841e-09	3.380921e-09	2.738758e-09	2.077097e-09	1.487175e-09	1.015435e-09	6.681796e-10	4.278832e-10	2.688651e-10	1.668542e-10	1.027636e-10	6.303638e-11	3.861690e-11	2.368058e-11	1.456849e-11	9.015271e-12	5.632243e-12	3.572497e-12	2.322491e-12	1.572742e-12	1.139488e-12	9.185731e-13	8.712886e-13	9.185731e-13	1.139488e-12	1.572742e-12	2.322491e-12	3.572497e-12	5.632243e-12	9.015271e-12	1.456849e-11	2.368058e-11	3.861690e-11	6.303638e-11	1.027636e-10	1.668542e-10	2.688651e-10	4.278832e-10	6.681796e-10	1.015435e-09	1.487175e-09	2.077097e-09	2.738758e-09	3.380921e-09	3.885841e-09	4.151187e-09	4.135873e-09	3.868520e-09	3.427877e-09	2.908022e-09	2.388571e-09	1.920593e-09	1.527021e-09	1.210743e-09	9.644260e-10	7.748975e-10	6.289794e-10	5.156035e-10	4.261767e-10	3.543469e-10	2.955707e-10	2.466731e-10	2.054676e-10	1.707154e-10	1.407537e-10	1.152907e-10	9.372889e-11	7.537617e-11	6.059089e-11	4.814352e-11	3.778182e-11	2.926410e-11	2.235919e-11	1.802489e-11	1.369059e-11	1.035311e-11	8.012437e-12	5.671770e-12	4.467278e-12	3.262787e-12	2.360021e-12	1.758978e-12	1.157936e-12	9.795716e-13	8.012069e-13	6.228423e-13	4.444777e-13	2.661131e-13	2.235495e-13	1.809860e-13	1.384224e-13	9.585883e-14	5.329526e-14	4.703063e-14	4.076599e-14	3.450136e-14	2.823672e-14	2.197209e-14	1.570745e-14	9.442815e-15	5.934449e-15	5.182352e-15	4.430254e-15	3.678157e-15	2.926060e-15	2.173962e-15	1.421865e-15	6.697675e-16	5.890199e-16	5.082724e-16	4.275248e-16	3.467773e-16	2.660297e-16	1.852822e-16	1.045347e-16	6.022015e-17	5.233870e-17	4.445724e-17	3.657579e-17	2.869434e-17	2.081288e-17	1.293143e-17	5.049975e-18	
2.368573e-18	5.941396e-18	9.514219e-18	1.308704e-17	1.665987e-17	2.023269e-17	2.380551e-17	2.737833e-17	4.729329e-17	8.355039e-17	1.198075e-16	1.560646e-16	1.923217e-16	2.285788e-16	2.648359e-16	3.010930e-16	6.352050e-16	9.693171e-16	1.303429e-15	1.637541e-15	1.971653e-15	2.305765e-15	2.639877e-15	4.184969e-15	6.941040e-15	9.697111e-15	1.245318e-14	1.520925e-14	1.796532e-14	2.072139e-14	2.347747e-14	4.199048e-14	6.050350e-14	7.901652e-14	9.752953e-14	1.160426e-13	1.927693e-13	2.694960e-13	3.462228e-13	4.229495e-13	4.996763e-13	7.547267e-13	1.009777e-12	1.390463e-12	1.896785e-12	2.403107e-12	3.377911e-12	4.352715e-12	5.734914e-12	7.524510e-12	9.314106e-12	1.214273e-11	1.562169e-11	1.984380e-11	2.490682e-11	3.091346e-11	3.836606e-11	4.713001e-11	5.750575e-11	6.977069e-11	8.408226e-11	1.012092e-10	1.217658e-10	1.468197e-10	1.779352e-10	2.173799e-10	2.683844e-10	3.354323e-10	4.245048e-10	5.430862e-10	6.990776e-10	8.983823e-10	1.142232e-09	1.421372e-09	1.710586e-09	1.966877e-09	2.136037e-09	2.169507e-09	2.045984e-09	1.785313e-09	1.444783e-09	1.091413e-09	7.770107e-10	5.272721e-10	3.449939e-10	2.199220e-10	1.377529e-10	8.533193e-11	5.252027e-11	3.222526e-11	1.976096e-11	1.213616e-11	7.480671e-12	4.639814e-12	2.906247e-12	1.848780e-12	1.205722e-12	8.192272e-13	5.954696e-13	4.812158e-13	4.567444e-13	4.812158e-13	5.954696e-13	8.192272e-13	1.205722e-12	1.848780e-12	2.906247e-12	4.639814e-12	7.480671e-12	1.213616e-11	1.976096e-11	3.222526e-11	5.252027e-11	8.533193e-11	1.377529e-10	2.199220e-10	3.449939e-10	5.272721e-10	7.770107e-10	1.091413e-09	1.444783e-09	1.785313e-09	2.045984e-09	2.169507e-09	2.136037e-09	1.966877e-09	1.710586e-09	1.421372e-09	1.142232e-09	8.983823e-10	6.990776e-10	5.430862e-10	4.245048e-10	3.354323e-10	2.683844e-10	2.173799e-10	1.779352e-10	1.468197e-10	1.217658e-10	1.012092e-10	8.408226e-11	6.977069e-11	5.750575e-11	4.713001e-11	3.836606e-11	3.091346e-11	2.490682e-11	1.984380e-11	1.562169e-11	1.214273e-11	9.314106e-12	7.524510e-12	5.734914e-12	4.352715e-12	3.377911e-12	2.403107e-12	1.896785e-12	1.390463e-12	1.009777e-12	7.547267e-13	4.996763e-13	4.229495e-13	3.462228e-13	2.694960e-13	1.927693e-13	1.160426e-13	9.752953e-14	7.901652e-14	6.050350e-14	4.199048e-14	2.347747e-14	2.072139e-14	1.796532e-14	1.520925e-14	1.245318e-14	9.697111e-15	6.941040e-15	4.184969e-15	2.639877e-15	2.305765e-15	1.971653e-15	1.637541e-15	1.303429e-15	9.693171e-16	6.352050e-16	3.010930e-16	2.648359e-16	2.285788e-16	1.923217e-16	1.560646e-16	1.198075e-16	8.355039e-17	4.729329e-17	2.737833e-17	2.380551e-17	2.023269e-17	1.665987e-17	1.308704e-17	9.514219e-18	5.941396e-18	2.368573e-18	
1.116419e-18	2.723872e-18	4.331325e-18	5.938778e-18	7.546230e-18	9.153683e-18	1.076114e-17	1.236859e-17	2.126018e-17	3.743590e-17	5.361163e-17	6.978735e-17	8.596307e-17	1.021388e-16	1.183145e-16	1.344902e-16	2.819829e-16	4.294755e-16	5.769681e-16	7.244607e-16	8.719533e-16	1.019446e-15	1.166939e-15	1.843255e-15	3.048396e-15	4.253537e-15	5.458678e-15	6.663819e-15	7.868960e-15	9.074102e-15	1.027924e-14	1.828430e-14	2.628936e-14	3.429442e-14	4.229947e-14	5.030453e-14	8.312472e-14	1.159449e-13	1.487651e-13	1.815853e-13	2.144055e-13	3.220573e-13	4.297090e-13	5.894182e-13	8.011848e-13	1.012951e-12	1.417021e-12	1.821090e-12	2.391007e-12	3.126772e-12	3.862537e-12	5.016973e-12	6.433013e-12	8.147987e-12	1.020155e-11	1.263567e-11	1.565607e-11	1.921288e-11	2.343667e-11	2.845531e-11	3.434973e-11	4.147338e-11	5.012538e-11	6.082079e-11	7.432167e-11	9.174789e-11	1.147245e-10	1.455629e-10	1.874481e-10	2.445423e-10	3.214209e-10	4.222669e-10	5.491659e-10	6.988581e-10	8.591451e-10	1.006938e-09	1.111087e-09	1.141862e-09	1.084345e-09	9.480534e-10	7.654637e-10	5.751100e-10	4.065291e-10	2.738265e-10	1.779799e-10	1.128644e-10	7.043796e-11	4.353874e-11	2.677213e-11	1.642707e-11	1.008075e-11	6.199025e-12	3.827565e-12	2.378892e-12	1.493590e-12	9.526490e-13	6.230957e-13	4.246611e-13	3.095871e-13	2.507535e-13	2.381444e-13	2.507535e-13	3.095871e-13	4.246611e-13	6.230957e-13	9.526490e-13	1.493590e-12	2.378892e-12	3.827565e-12	6.199025e-12	1.008075e-11	1.642707e-11	2.677213e-11	4.353874e-11	7.043796e-11	1.128644e-10	1.779799e-10	2.738265e-10	4.065291e-10	5.751100e-10	7.654637e-10	9.480534e-10	1.084345e-09	1.141862e-09	1.111087e-09	1.006938e-09	8.591451e-10	6.988581e-10	5.491659e-10	4.222669e-10	3.214209e-10	2.445423e-10	1.874481e-10	1.455629e-10	1.147245e-10	9.174789e-11	7.432167e-11	6.082079e-11	5.012538e-11	4.147338e-11	3.434973e-11	2.845531e-11	2.343667e-11	1.921288e-11	1.565607e-11	1.263567e-11	1.020155e-11	8.147987e-12	6.433013e-12	5.016973e-12	3.862537e-12	3.126772e-12	2.391007e-12	1.821090e-12	1.417021e-12	1.012951e-12	8.011848e-13	5.894182e-13	4.297090e-13	3.220573e-13	2.144055e-13	1.815853e-13	1.487651e-13	1.159449e-13	8.312472e-14	5.030453e-14	4.229947e-14	3.429442e-14	2.628936e-14	1.828430e-14	1.027924e-14	9.074102e-15	7.868960e-15	6.663819e-15	5.458678e-15	4.253537e-15	3.048396e-15	1.843255e-15	1.166939e-15	1.019446e-15	8.719533e-16	7.244607e-16	5.769681e-16	4.294755e-16	2.819829e-16	1.344902e-16	1.183145e-16	1.021388e-16	8.596307e-17	6.978735e-17	5.361163e-17	3.743590e-17	2.126018e-17	1.236859e-17	1.076114e-17	9.153683e-18	7.546230e-18	5.938778e-18	4.331325e-18	2.723872e-18	1.116419e-18	
5.313957e-19	1.248913e-18	1.966430e-18	2.683947e-18	3.401464e-18	4.118981e-18	4.836498e-18	5.554015e-18	9.498831e-18	1.667094e-17	2.384306e-17	3.101517e-17	3.818729e-17	4.535940e-17	5.253151e-17	5.970363e-17	1.244212e-16	1.891388e-16	2.538564e-16	3.185740e-16	3.832916e-16	4.480092e-16	5.127268e-16	8.070436e-16	1.330960e-15	1.854876e-15	2.378792e-15	2.902708e-15	3.426624e-15	3.950540e-15	4.474456e-15	7.916626e-15	1.135880e-14	1.480097e-14	1.824314e-14	2.168531e-14	3.565005e-14	4.961479e-14	6.357953e-14	7.754427e-14	9.150901e-14	1.367194e-13	1.819298e-13	2.486123e-13	3.367671e-13	4.249218e-13	5.916883e-13	7.584547e-13	9.924974e-13	1.293816e-12	1.595135e-12	2.064703e-12	2.639290e-12	3.333948e-12	4.164810e-12	5.149097e-12	6.371286e-12	7.813217e-12	9.531714e-12	1.158540e-11	1.401465e-11	1.698138e-11	2.062952e-11	2.520559e-11	3.107821e-11	3.879663e-11	4.917255e-11	6.338797e-11	8.312146e-11	1.106432e-10	1.485747e-10	1.996494e-10	2.657359e-10	3.460412e-10	4.348216e-10	5.197386e-10	5.828939e-10	6.061214e-10	5.793006e-10	5.069535e-10	4.077812e-10	3.042090e-10	2.131681e-10	1.423326e-10	9.181037e-11	5.787822e-11	3.597366e-11	2.218014e-11	1.362183e-11	8.355981e-12	5.130135e-12	3.157864e-12	1.952589e-12	1.215717e-12	7.648766e-13	4.890079e-13	3.206773e-13	2.191573e-13	1.601984e-13	1.300206e-13	1.235494e-13	1.300206e-13	1.601984e-13	2.191573e-13	3.206773e-13	4.890079e-13	7.648766e-13	1.215717e-12	1.952589e-12	3.157864e-12	5.130135e-12	8.355981e-12	1.362183e-11	2.218014e-11	3.597366e-11	5.787822e-11	9.181037e-11	1.423326e-10	2.131681e-10	3.042090e-10	4.077812e-10	5.069535e-10	5.793006e-10	6.061214e-10	5.828939e-10	5.197386e-10	4.348216e-10	3.460412e-10	2.657359e-10	1.996494e-10	1.485747e-10	1.106432e-10	8.312146e-11	6.338797e-11	4.917255e-11	3.879663e-11	3.107821e-11	2.520559e-11	2.062952e-11	1.698138e-11	1.401465e-11	1.158540e-11	9.531714e-12	7.813217e-12	6.371286e-12	5.149097e-12	4.164810e-12	3.333948e-12	2.639290e-12	2.064703e-12	1.595135e-12	1.293816e-12	9.924974e-13	7.584547e-13	5.916883e-13	4.249218e-13	3.367671e-13	2.486123e-13	1.819298e-13	1.367194e-13	9.150901e-14	7.754427e-14	6.357953e-14	4.961479e-14	3.565005e-14	2.168531e-14	1.824314e-14	1.480097e-14	1.135880e-14	7.916626e-15	4.474456e-15	3.950540e-15	3.426624e-15	2.902708e-15	2.378792e-15	1.854876e-15	1.330960e-15	8.070436e-16	5.127268e-16	4.480092e-16	3.832916e-16	3.185740e-16	2.538564e-16	1.891388e-16	1.244212e-16	5.970363e-17	5.253151e-17	4.535940e-17	3.818729e-17	3.101517e-17	2.384306e-17	1.667094e-17	9.498831e-18	5.554015e-18	4.836498e-18	4.118981e-18	3.401464e-18	2.683947e-18	1.966430e-18	1.248913e-18	5.313957e-19	
2.568540e-19	5.744034e-19	8.919527e-19	1.209502e-18	1.527051e-18	1.844601e-18	2.162150e-18	2.479699e-18	4.219036e-18	7.380158e-18	1.054128e-17	1.370240e-17	1.686353e-17	2.002465e-17	2.318577e-17	2.634690e-17	5.457972e-17	8.281255e-17	1.110454e-16	1.392782e-16	1.675110e-16	1.957439e-16	2.239767e-16	3.513452e-16	5.778495e-16	8.043538e-16	1.030858e-15	1.257362e-15	1.483867e-15	1.710371e-15	1.936875e-15	3.409201e-15	4.881526e-15	6.353852e-15	7.826178e-15	9.298503e-15	1.521076e-14	2.112302e-14	2.703529e-14	3.294755e-14	3.885981e-14	5.775776e-14	7.665571e-14	1.043731e-13	1.409099e-13	1.774468e-13	2.459984e-13	3.145500e-13	4.103057e-13	5.332654e-13	6.562250e-13	8.466425e-13	1.079151e-12	1.359837e-12	1.695288e-12	2.092598e-12	2.586566e-12	3.170728e-12	3.869858e-12	4.710742e-12	5.713125e-12	6.951065e-12	8.493303e-12	1.045731e-11	1.302072e-11	1.645199e-11	2.115496e-11	2.773117e-11	3.705932e-11	5.036078e-11	6.912941e-11	9.506668e-11	1.295757e-10	1.727717e-10	2.220569e-10	2.708691e-10	3.089004e-10	3.250243e-10	3.124802e-10	2.733918e-10	2.187215e-10	1.617125e-10	1.121348e-10	7.411542e-11	4.739766e-11	2.968488e-11	1.836677e-11	1.129202e-11	6.924126e-12	4.244892e-12	2.606434e-12	1.605440e-12	9.937534e-13	6.196144e-13	3.905132e-13	2.501716e-13	1.644279e-13	1.126472e-13	8.253772e-14	6.711158e-14	6.380208e-14	6.711158e-14	8.253772e-14	1.126472e-13	1.644279e-13	2.501716e-13	3.905132e-13	6.196144e-13	9.937534e-13	1.605440e-12	2.606434e-12	4.244892e-12	6.924126e-12	1.129202e-11	1.836677e-11	2.968488e-11	4.739766e-11	7.411542e-11	1.121348e-10	1.617125e-10	2.187215e-10	2.733918e-10	3.124802e-10	3.250243e-10	3.089004e-10	2.708691e-10	2.220569e-10	1.727717e-10	1.295757e-10	9.506668e-11	6.912941e-11	5.036078e-11	3.705932e-11	2.773117e-11	2.115496e-11	1.645199e-11	1.302072e-11	1.045731e-11	8.493303e-12	6.951065e-12	5.713125e-12	4.710742e-12	3.869858e-12	3.170728e-12	2.586566e-12	2.092598e-12	1.695288e-12	1.359837e-12	1.079151e-12	8.466425e-13	6.562250e-13	5.332654e-13	4.103057e-13	3.145500e-13	2.459984e-13	1.774468e-13	1.409099e-13	1.043731e-13	7.665571e-14	5.775776e-14	3.885981e-14	3.294755e-14	2.703529e-14	2.112302e-14	1.521076e-14	9.298503e-15	7.826178e-15	6.353852e-15	4.881526e-15	3.409201e-15	1.936875e-15	1.710371e-15	1.483867e-15	1.257362e-15	1.030858e-15	8.043538e-16	5.778495e-16	3.513452e-16	2.239767e-16	1.957439e-16	1.675110e-16	1.392782e-16	1.110454e-16	8.281255e-17	5.457972e-17	2.634690e-17	2.318577e-17	2.002465e-17	1.686353e-17	1.370240e-17	1.054128e-17	7.380158e-18	4.219036e-18	2.479699e-18	2.162150e-18	1.844601e-18	1.527051e-18	1.209502e-18	8.919527e-19	5.744034e-19	2.568540e-19	
1.267741e-19	2.659666e-19	4.051590e-19	5.443514e-19	6.835438e-19	8.227362e-19	9.619287e-19	1.101121e-18	1.863355e-18	3.248630e-18	4.633905e-18	6.019180e-18	7.404455e-18	8.789730e-18	1.017500e-17	1.156028e-17	2.380824e-17	3.605621e-17	4.830417e-17	6.055213e-17	7.280009e-17	8.504806e-17	9.729602e-17	1.521233e-16	2.495298e-16	3.469363e-16	4.443428e-16	5.417493e-16	6.391558e-16	7.365623e-16	8.339688e-16	1.460573e-15	2.087176e-15	2.713780e-15	3.340384e-15	3.966988e-15	6.458283e-15	8.949579e-15	1.144087e-14	1.393217e-14	1.642347e-14	2.428810e-14	3.215274e-14	4.362579e-14	5.870727e-14	7.378874e-14	1.018635e-13	1.299383e-13	1.689823e-13	2.189955e-13	2.690088e-13	3.460167e-13	4.398739e-13	5.530491e-13	6.882439e-13	8.483933e-13	1.047883e-12	1.284486e-12	1.569030e-12	1.913732e-12	2.328127e-12	2.846097e-12	3.500347e-12	4.346785e-12	5.470945e-12	7.003955e-12	9.146590e-12	1.220440e-11	1.663574e-11	2.309325e-11	3.242275e-11	4.565467e-11	6.375899e-11	8.710809e-11	1.146038e-10	1.427759e-10	1.656623e-10	1.764062e-10	1.705114e-10	1.489588e-10	1.183052e-10	8.650641e-11	5.924533e-11	3.870491e-11	2.451576e-11	1.524418e-11	9.385018e-12	5.751263e-12	3.519702e-12	2.155581e-12	1.323131e-12	8.151572e-13	5.048995e-13	3.151273e-13	1.988747e-13	1.276110e-13	8.403204e-14	5.768813e-14	4.235489e-14	3.449312e-14	3.280582e-14	3.449312e-14	4.235489e-14	5.768813e-14	8.403204e-14	1.276110e-13	1.988747e-13	3.151273e-13	5.048995e-13	8.151572e-13	1.323131e-12	2.155581e-12	3.519702e-12	5.751263e-12	9.385018e-12	1.524418e-11	2.451576e-11	3.870491e-11	5.924533e-11	8.650641e-11	1.183052e-10	1.489588e-10	1.705114e-10	1.764062e-10	1.656623e-10	1.427759e-10	1.146038e-10	8.710809e-11	6.375899e-11	4.565467e-11	3.242275e-11	2.309325e-11	1.663574e-11	1.220440e-11	9.146590e-12	7.003955e-12	5.470945e-12	4.346785e-12	3.500347e-12	2.846097e-12	2.328127e-12	1.913732e-12	1.569030e-12	1.284486e-12	1.047883e-12	8.483933e-13	6.882439e-13	5.530491e-13	4.398739e-13	3.460167e-13	2.690088e-13	2.189955e-13	1.689823e-13	1.299383e-13	1.018635e-13	7.378874e-14	5.870727e-14	4.362579e-14	3.215274e-14	2.428810e-14	1.642347e-14	1.393217e-14	1.144087e-14	8.949579e-15	6.458283e-15	3.966988e-15	3.340384e-15	2.713780e-15	2.087176e-15	1.460573e-15	8.339688e-16	7.365623e-16	6.391558e-16	5.417493e-16	4.443428e-16	3.469363e-16	2.495298e-16	1.521233e-16	9.729602e-17	8.504806e-17	7.280009e-17	6.055213e-17	4.830417e-17	3.605621e-17	2.380824e-17	1.156028e-17	1.017500e-17	8.789730e-18	7.404455e-18	6.019180e-18	4.633905e-18	3.248630e-18	1.863355e-18	1.101121e-18	9.619287e-19	8.227362e-19	6.835438e-19	5.443514e-19	4.051590e-19	2.659666e-19	1.267741e-19	
6.415502e-20	1.244868e-19	1.848187e-19	2.451505e-19	3.054823e-19	3.658142e-19	4.261460e-19	4.864778e-19	8.184863e-19	1.422172e-18	2.025857e-18	2.629542e-18	3.233227e-18	3.836912e-18	4.440598e-18	5.044283e-18	1.032921e-17	1.561413e-17	2.089905e-17	2.618398e-17	3.146890e-17	3.675383e-17	4.203875e-17	6.551952e-17	1.071961e-16	1.488728e-16	1.905494e-16	2.322260e-16	2.739026e-16	3.155793e-16	3.572559e-16	6.226578e-16	8.880597e-16	1.153462e-15	1.418864e-15	1.684266e-15	2.729372e-15	3.774478e-15	4.819585e-15	5.864691e-15	6.909798e-15	1.016928e-14	1.342877e-14	1.815932e-14	2.436093e-14	3.056254e-14	4.202105e-14	5.347956e-14	6.935009e-14	8.963265e-14	1.099152e-13	1.409835e-13	1.787911e-13	2.243432e-13	2.787524e-13	3.432391e-13	4.237743e-13	5.196283e-13	6.355483e-13	7.771072e-13	9.488741e-13	1.166382e-12	1.445181e-12	1.811918e-12	2.307865e-12	2.997221e-12	3.980009e-12	5.411634e-12	7.531228e-12	1.068640e-11	1.535492e-11	2.215025e-11	3.171346e-11	4.442619e-11	5.988352e-11	7.626510e-11	9.010147e-11	9.712669e-11	9.434057e-11	8.217736e-11	6.465504e-11	4.664549e-11	3.148523e-11	2.029976e-11	1.272241e-11	7.849233e-12	4.805840e-12	2.934058e-12	1.791137e-12	1.095215e-12	6.716569e-13	4.136485e-13	2.562346e-13	1.600047e-13	1.010632e-13	6.492427e-14	4.281453e-14	2.944076e-14	2.165163e-14	1.765578e-14	1.679795e-14	1.765578e-14	2.165163e-14	2.944076e-14	4.281453e-14	6.492427e-14	1.010632e-13	1.600047e-13	2.562346e-13	4.136485e-13	6.716569e-13	1.095215e-12	1.791137e-12	2.934058e-12	4.805840e-12	7.849233e-12	1.272241e-11	2.029976e-11	3.148523e-11	4.664549e-11	6.465504e-11	8.217736e-11	9.434057e-11	9.712669e-11	9.010147e-11	7.626510e-11	5.988352e-11	4.442619e-11	3.171346e-11	2.215025e-11	1.535492e-11	1.068640e-11	7.531228e-12	5.411634e-12	3.980009e-12	2.997221e-12	2.307865e-12	1.811918e-12	1.445181e-12	1.166382e-12	9.488741e-13	7.771072e-13	6.355483e-13	5.196283e-13	4.237743e-13	3.432391e-13	2.787524e-13	2.243432e-13	1.787911e-13	1.409835e-13	1.099152e-13	8.963265e-14	6.935009e-14	5.347956e-14	4.202105e-14	3.056254e-14	2.436093e-14	1.815932e-14	1.342877e-14	1.016928e-14	6.909798e-15	5.864691e-15	4.819585e-15	3.774478e-15	2.729372e-15	1.684266e-15	1.418864e-15	1.153462e-15	8.880597e-16	6.226578e-16	3.572559e-16	3.155793e-16	2.739026e-16	2.322260e-16	1.905494e-16	1.488728e-16	1.071961e-16	6.551952e-17	4.203875e-17	3.675383e-17	3.146890e-17	2.618398e-17	2.089905e-17	1.561413e-17	1.032921e-17	5.044283e-18	4.440598e-18	3.836912e-18	3.233227e-18	2.629542e-18	2.025857e-18	1.422172e-18	8.184863e-19	4.864778e-19	4.261460e-19	3.658142e-19	3.054823e-19	2.451505e-19	1.848187e-19	1.244868e-19	6.415502e-20	
3.332462e-20	5.912286e-20	8.492111e-20	1.107194e-19	1.365176e-19	1.623158e-19	1.881141e-19	2.139123e-19	3.576394e-19	6.192953e-19	8.809512e-19	1.142607e-18	1.404263e-18	1.665919e-18	1.927575e-18	2.189231e-18	4.457812e-18	6.726393e-18	8.994974e-18	1.126356e-17	1.353214e-17	1.580072e-17	1.806930e-17	2.807605e-17	4.582096e-17	6.356588e-17	8.131080e-17	9.905571e-17	1.168006e-16	1.345455e-16	1.522905e-16	2.641904e-16	3.760903e-16	4.879902e-16	5.998901e-16	7.117901e-16	1.148367e-15	1.584945e-15	2.021522e-15	2.458100e-15	2.894677e-15	4.240333e-15	5.585989e-15	7.529378e-15	1.007050e-14	1.261162e-14	1.727359e-14	2.193555e-14	2.836826e-14	3.657172e-14	4.477519e-14	5.728297e-14	7.248515e-14	9.079274e-14	1.126662e-13	1.386155e-13	1.711305e-13	2.099920e-13	2.572897e-13	3.155695e-13	3.870123e-13	4.787656e-13	5.982396e-13	7.581831e-13	9.786028e-13	1.291091e-12	1.745725e-12	2.421881e-12	3.444622e-12	5.000061e-12	7.357358e-12	1.087903e-11	1.597804e-11	2.296831e-11	3.175033e-11	4.138101e-11	4.982613e-11	5.439780e-11	5.307403e-11	4.602827e-11	3.578973e-11	2.540773e-11	1.686330e-11	1.071233e-11	6.635908e-12	4.059054e-12	2.469878e-12	1.501175e-12	9.134346e-13	5.572166e-13	3.411559e-13	2.098794e-13	1.299352e-13	8.112687e-14	5.125556e-14	3.294787e-14	2.174810e-14	1.497250e-14	1.102515e-14	8.999581e-15	8.564665e-15	8.999581e-15	1.102515e-14	1.497250e-14	2.174810e-14	3.294787e-14	5.125556e-14	8.112687e-14	1.299352e-13	2.098794e-13	3.411559e-13	5.572166e-13	9.134346e-13	1.501175e-12	2.469878e-12	4.059054e-12	6.635908e-12	1.071233e-11	1.686330e-11	2.540773e-11	3.578973e-11	4.602827e-11	5.307403e-11	5.439780e-11	4.982613e-11	4.138101e-11	3.175033e-11	2.296831e-11	1.597804e-11	1.087903e-11	7.357358e-12	5.000061e-12	3.444622e-12	2.421881e-12	1.745725e-12	1.291091e-12	9.786028e-13	7.581831e-13	5.982396e-13	4.787656e-13	3.870123e-13	3.155695e-13	2.572897e-13	2.099920e-13	1.711305e-13	1.386155e-13	1.126662e-13	9.079274e-14	7.248515e-14	5.728297e-14	4.477519e-14	3.657172e-14	2.836826e-14	2.193555e-14	1.727359e-14	1.261162e-14	1.007050e-14	7.529378e-15	5.585989e-15	4.240333e-15	2.894677e-15	2.458100e-15	2.021522e-15	1.584945e-15	1.148367e-15	7.117901e-16	5.998901e-16	4.879902e-16	3.760903e-16	2.641904e-16	1.522905e-16	1.345455e-16	1.168006e-16	9.905571e-17	8.131080e-17	6.356588e-17	4.582096e-17	2.807605e-17	1.806930e-17	1.580072e-17	1.353214e-17	1.126356e-17	8.994974e-18	6.726393e-18	4.457812e-18	2.189231e-18	1.927575e-18	1.665919e-18	1.404263e-18	1.142607e-18	8.809512e-19	6.192953e-19	3.576394e-19	2.139123e-19	1.881141e-19	1.623158e-19	1.365176e-19	1.107194e-19	8.492111e-20	5.912286e-20	3.332462e-20	
1.771437e-20	2.856199e-20	3.940961e-20	5.025723e-20	6.110485e-20	7.195247e-20	8.280009e-20	9.364771e-20	1.554754e-19	2.682830e-19	3.810907e-19	4.938984e-19	6.067061e-19	7.195138e-19	8.323214e-19	9.451291e-19	1.914000e-18	2.882870e-18	3.851741e-18	4.820612e-18	5.789482e-18	6.758353e-18	7.727224e-18	1.197149e-17	1.949114e-17	2.701079e-17	3.453045e-17	4.205010e-17	4.956975e-17	5.708941e-17	6.460906e-17	1.115818e-16	1.585546e-16	2.055274e-16	2.525002e-16	2.994730e-16	4.811143e-16	6.627555e-16	8.443968e-16	1.026038e-15	1.207679e-15	1.761196e-15	2.314712e-15	3.110360e-15	4.148141e-15	5.185922e-15	7.077147e-15	8.968373e-15	1.156896e-14	1.487890e-14	1.818884e-14	2.321508e-14	2.931851e-14	3.666794e-14	4.545494e-14	5.589377e-14	6.902792e-14	8.480277e-14	1.041424e-13	1.282131e-13	1.580545e-13	1.969726e-13	2.485123e-13	3.188091e-13	4.176273e-13	5.606286e-13	7.730761e-13	1.095817e-12	1.594641e-12	2.370214e-12	3.574440e-12	5.421447e-12	8.174004e-12	1.206820e-11	1.712804e-11	2.287483e-11	2.810485e-11	3.109748e-11	3.046886e-11	2.626787e-11	2.013274e-11	1.402100e-11	9.125954e-12	5.701059e-12	3.486064e-12	2.111773e-12	1.275666e-12	7.710287e-13	4.671196e-13	2.839858e-13	1.734141e-13	1.064755e-13	6.582776e-14	4.106541e-14	2.593486e-14	1.667182e-14	1.100901e-14	7.584364e-15	5.589468e-15	4.565794e-15	4.345994e-15	4.565794e-15	5.589468e-15	7.584364e-15	1.100901e-14	1.667182e-14	2.593486e-14	4.106541e-14	6.582776e-14	1.064755e-13	1.734141e-13	2.839858e-13	4.671196e-13	7.710287e-13	1.275666e-12	2.111773e-12	3.486064e-12	5.701059e-12	9.125954e-12	1.402100e-11	2.013274e-11	2.626787e-11	3.046886e-11	3.109748e-11	2.810485e-11	2.287483e-11	1.712804e-11	1.206820e-11	8.174004e-12	5.421447e-12	3.574440e-12	2.370214e-12	1.594641e-12	1.095817e-12	7.730761e-13	5.606286e-13	4.176273e-13	3.188091e-13	2.485123e-13	1.969726e-13	1.580545e-13	1.282131e-13	1.041424e-13	8.480277e-14	6.902792e-14	5.589377e-14	4.545494e-14	3.666794e-14	2.931851e-14	2.321508e-14	1.818884e-14	1.487890e-14	1.156896e-14	8.968373e-15	7.077147e-15	5.185922e-15	4.148141e-15	3.110360e-15	2.314712e-15	1.761196e-15	1.207679e-15	1.026038e-15	8.443968e-16	6.627555e-16	4.811143e-16	2.994730e-16	2.525002e-16	2.055274e-16	1.585546e-16	1.115818e-16	6.460906e-17	5.708941e-17	4.956975e-17	4.205010e-17	3.453045e-17	2.701079e-17	1.949114e-17	1.197149e-17	7.727224e-18	6.758353e-18	5.789482e-18	4.820612e-18	3.851741e-18	2.882870e-18	1.914000e-18	9.451291e-19	8.323214e-19	7.195138e-19	6.067061e-19	4.938984e-19	3.810907e-19	2.682830e-19	1.554754e-19	9.364771e-20	8.280009e-20	7.195247e-20	6.110485e-20	5.025723e-20	3.940961e-20	2.856199e-20	1.771437e-20	
9.566629e-21	1.403236e-20	1.849809e-20	2.296382e-20	2.742955e-20	3.189529e-20	3.636102e-20	4.082675e-20	6.724794e-20	1.156246e-19	1.640012e-19	2.123779e-19	2.607545e-19	3.091312e-19	3.575078e-19	4.058844e-19	8.175945e-19	1.229305e-18	1.641015e-18	2.052725e-18	2.464435e-18	2.876145e-18	3.287855e-18	5.079575e-18	8.251305e-18	1.142304e-17	1.459477e-17	1.776650e-17	2.093823e-17	2.410996e-17	2.728169e-17	4.691533e-17	6.654898e-17	8.618262e-17	1.058163e-16	1.254499e-16	2.007305e-16	2.760110e-16	3.512916e-16	4.265721e-16	5.018526e-16	7.287416e-16	9.556305e-16	1.280325e-15	1.702825e-15	2.125325e-15	2.890463e-15	3.655600e-15	4.704451e-15	6.037015e-15	7.369580e-15	9.386141e-15	1.183347e-14	1.478125e-14	1.830960e-14	2.250902e-14	2.781915e-14	3.423326e-14	4.216198e-14	5.214123e-14	6.466685e-14	8.127639e-14	1.036743e-13	1.348329e-13	1.795547e-13	2.456715e-13	3.460487e-13	5.019139e-13	7.482030e-13	1.140113e-12	1.764031e-12	2.747309e-12	4.256997e-12	6.463717e-12	9.433281e-12	1.293113e-11	1.623642e-11	1.822595e-11	1.793369e-11	1.534829e-11	1.156200e-11	7.869900e-12	5.006377e-12	3.067786e-12	1.847970e-12	1.106655e-12	6.625151e-13	3.975611e-13	2.394576e-13	1.448919e-13	8.814261e-14	5.395828e-14	3.328391e-14	2.072959e-14	1.307760e-14	8.401719e-15	5.547002e-15	3.822116e-15	2.817899e-15	2.302740e-15	2.192139e-15	2.302740e-15	2.817899e-15	3.822116e-15	5.547002e-15	8.401719e-15	1.307760e-14	2.072959e-14	3.328391e-14	5.395828e-14	8.814261e-14	1.448919e-13	2.394576e-13	3.975611e-13	6.625151e-13	1.106655e-12	1.847970e-12	3.067786e-12	5.006377e-12	7.869900e-12	1.156200e-11	1.534829e-11	1.793369e-11	1.822595e-11	1.623642e-11	1.293113e-11	9.433281e-12	6.463717e-12	4.256997e-12	2.747309e-12	1.764031e-12	1.140113e-12	7.482030e-13	5.019139e-13	3.460487e-13	2.456715e-13	1.795547e-13	1.348329e-13	1.036743e-13	8.127639e-14	6.466685e-14	5.214123e-14	4.216198e-14	3.423326e-14	2.781915e-14	2.250902e-14	1.830960e-14	1.478125e-14	1.183347e-14	9.386141e-15	7.369580e-15	6.037015e-15	4.704451e-15	3.655600e-15	2.890463e-15	2.125325e-15	1.702825e-15	1.280325e-15	9.556305e-16	7.287416e-16	5.018526e-16	4.265721e-16	3.512916e-16	2.760110e-16	2.007305e-16	1.254499e-16	1.058163e-16	8.618262e-17	6.654898e-17	4.691533e-17	2.728169e-17	2.410996e-17	2.093823e-17	1.776650e-17	1.459477e-17	1.142304e-17	8.251305e-18	5.079575e-18	3.287855e-18	2.876145e-18	2.464435e-18	2.052725e-18	1.641015e-18	1.229305e-18	8.175945e-19	4.058844e-19	3.575078e-19	3.091312e-19	2.607545e-19	2.123779e-19	1.640012e-19	1.156246e-19	6.724794e-20	4.082675e-20	3.636102e-20	3.189529e-20	2.742955e-20	2.296382e-20	1.849809e-20	1.403236e-20	9.566629e-21	
5.192521e-21	6.982658e-21	8.772796e-21	1.056293e-20	1.235307e-20	1.414321e-20	1.593334e-20	1.772348e-20	2.893445e-20	4.956624e-20	7.019804e-20	9.082983e-20	1.114616e-19	1.320934e-19	1.527252e-19	1.733570e-19	3.474071e-19	5.214572e-19	6.955072e-19	8.695573e-19	1.043607e-18	1.217657e-18	1.391708e-18	2.144471e-18	3.475947e-18	4.807423e-18	6.138900e-18	7.470376e-18	8.801852e-18	1.013333e-17	1.146480e-17	1.963594e-17	2.780707e-17	3.597821e-17	4.414934e-17	5.232047e-17	8.340028e-17	1.144801e-16	1.455599e-16	1.766397e-16	2.077195e-16	3.004066e-16	3.930936e-16	5.251815e-16	6.966703e-16	8.681590e-16	1.176914e-15	1.485670e-15	1.907741e-15	2.443129e-15	2.978516e-15	3.786414e-15	4.766669e-15	5.948177e-15	7.364602e-15	9.054373e-15	1.120365e-14	1.381661e-14	1.707649e-14	2.123019e-14	2.651410e-14	3.364670e-14	4.345061e-14	5.737381e-14	7.779393e-14	1.086575e-13	1.565740e-13	2.326837e-13	3.557625e-13	5.565030e-13	8.847050e-13	1.417204e-12	2.261407e-12	3.539562e-12	5.325674e-12	7.512709e-12	9.661018e-12	1.101803e-11	1.089354e-11	9.246260e-12	6.823910e-12	4.516330e-12	2.793547e-12	1.672151e-12	9.889321e-13	5.837558e-13	3.454764e-13	2.053865e-13	1.227680e-13	7.382477e-14	4.468494e-14	2.724527e-14	1.675340e-14	1.040927e-14	6.555396e-15	4.206520e-15	2.775269e-15	1.911680e-15	1.409377e-15	1.151843e-15	1.096565e-15	1.151843e-15	1.409377e-15	1.911680e-15	2.775269e-15	4.206520e-15	6.555396e-15	1.040927e-14	1.675340e-14	2.724527e-14	4.468494e-14	7.382477e-14	1.227680e-13	2.053865e-13	3.454764e-13	5.837558e-13	9.889321e-13	1.672151e-12	2.793547e-12	4.516330e-12	6.823910e-12	9.246260e-12	1.089354e-11	1.101803e-11	9.661018e-12	7.512709e-12	5.325674e-12	3.539562e-12	2.261407e-12	1.417204e-12	8.847050e-13	5.565030e-13	3.557625e-13	2.326837e-13	1.565740e-13	1.086575e-13	7.779393e-14	5.737381e-14	4.345061e-14	3.364670e-14	2.651410e-14	2.123019e-14	1.707649e-14	1.381661e-14	1.120365e-14	9.054373e-15	7.364602e-15	5.948177e-15	4.766669e-15	3.786414e-15	2.978516e-15	2.443129e-15	1.907741e-15	1.485670e-15	1.176914e-15	8.681590e-16	6.966703e-16	5.251815e-16	3.930936e-16	3.004066e-16	2.077195e-16	1.766397e-16	1.455599e-16	1.144801e-16	8.340028e-17	5.232047e-17	4.414934e-17	3.597821e-17	2.780707e-17	1.963594e-17	1.146480e-17	1.013333e-17	8.801852e-18	7.470376e-18	6.138900e-18	4.807423e-18	3.475947e-18	2.144471e-18	1.391708e-18	1.217657e-18	1.043607e-18	8.695573e-19	6.955072e-19	5.214572e-19	3.474071e-19	1.733570e-19	1.527252e-19	1.320934e-19	1.114616e-19	9.082983e-20	7.019804e-20	4.956624e-20	2.893445e-20	1.772348e-20	1.593334e-20	1.414321e-20	1.235307e-20	1.056293e-20	8.772796e-21	6.982658e-21	5.192521e-21	
2.794491e-21	3.488941e-21	4.183392e-21	4.877842e-21	5.572292e-21	6.266743e-21	6.961193e-21	7.655644e-21	1.237551e-20	2.112078e-20	2.986606e-20	3.861134e-20	4.735661e-20	5.610189e-20	6.484716e-20	7.359244e-20	1.467556e-19	2.199187e-19	2.930819e-19	3.662450e-19	4.394082e-19	5.125713e-19	5.857344e-19	9.003482e-19	1.456412e-18	2.012477e-18	2.568541e-18	3.124605e-18	3.680670e-18	4.236734e-18	4.792798e-18	8.177733e-18	1.156267e-17	1.494760e-17	1.833254e-17	2.171747e-17	3.449665e-17	4.727583e-17	6.005501e-17	7.283419e-17	8.561337e-17	1.233442e-16	1.610750e-16	2.146359e-16	2.840269e-16	3.534179e-16	4.776854e-16	6.019529e-16	7.714193e-16	9.860846e-16	1.200750e-15	1.523957e-15	1.916161e-15	2.389388e-15	2.957835e-15	3.637876e-15	4.508619e-15	5.574828e-15	6.918400e-15	8.653047e-15	1.089111e-14	1.396872e-14	1.828286e-14	2.453959e-14	3.391814e-14	4.841252e-14	7.143152e-14	1.088530e-13	1.708528e-13	2.746913e-13	4.494950e-13	7.425186e-13	1.224437e-12	1.984521e-12	3.094395e-12	4.514913e-12	5.969384e-12	6.931973e-12	6.895779e-12	5.804499e-12	4.179470e-12	2.664998e-12	1.587770e-12	9.216758e-13	5.322968e-13	3.084615e-13	1.799093e-13	1.057157e-13	6.260001e-14	3.735972e-14	2.247602e-14	1.363758e-14	8.353710e-15	5.174845e-15	3.251543e-15	2.083013e-15	1.372706e-15	9.448858e-16	6.963559e-16	5.690320e-16	5.417123e-16	5.690320e-16	6.963559e-16	9.448858e-16	1.372706e-15	2.083013e-15	3.251543e-15	5.174845e-15	8.353710e-15	1.363758e-14	2.247602e-14	3.735972e-14	6.260001e-14	1.057157e-13	1.799093e-13	3.084615e-13	5.322968e-13	9.216758e-13	1.587770e-12	2.664998e-12	4.179470e-12	5.804499e-12	6.895779e-12	6.931973e-12	5.969384e-12	4.514913e-12	3.094395e-12	1.984521e-12	1.224437e-12	7.425186e-13	4.494950e-13	2.746913e-13	1.708528e-13	1.088530e-13	7.143152e-14	4.841252e-14	3.391814e-14	2.453959e-14	1.828286e-14	1.396872e-14	1.089111e-14	8.653047e-15	6.918400e-15	5.574828e-15	4.508619e-15	3.637876e-15	2.957835e-15	2.389388e-15	1.916161e-15	1.523957e-15	1.200750e-15	9.860846e-16	7.714193e-16	6.019529e-16	4.776854e-16	3.534179e-16	2.840269e-16	2.146359e-16	1.610750e-16	1.233442e-16	8.561337e-17	7.283419e-17	6.005501e-17	4.727583e-17	3.449665e-17	2.171747e-17	1.833254e-17	1.494760e-17	1.156267e-17	8.177733e-18	4.792798e-18	4.236734e-18	3.680670e-18	3.124605e-18	2.568541e-18	2.012477e-18	1.456412e-18	9.003482e-19	5.857344e-19	5.125713e-19	4.394082e-19	3.662450e-19	2.930819e-19	2.199187e-19	1.467556e-19	7.359244e-20	6.484716e-20	5.610189e-20	4.735661e-20	3.861134e-20	2.986606e-20	2.112078e-20	1.237551e-20	7.655644e-21	6.961193e-21	6.266743e-21	5.572292e-21	4.877842e-21	4.183392e-21	3.488941e-21	2.794491e-21	
1.466747e-21	1.726202e-21	1.985658e-21	2.245113e-21	2.504569e-21	2.764024e-21	3.023479e-21	3.282935e-21	5.251880e-21	8.930316e-21	1.260875e-20	1.628719e-20	1.996562e-20	2.364406e-20	2.732249e-20	3.100093e-20	6.153985e-20	9.207877e-20	1.226177e-19	1.531566e-19	1.836955e-19	2.142344e-19	2.447734e-19	3.754195e-19	6.061729e-19	8.369264e-19	1.067680e-18	1.298433e-18	1.529187e-18	1.759940e-18	1.990693e-18	3.385032e-18	4.779370e-18	6.173708e-18	7.568047e-18	8.962385e-18	1.419116e-17	1.941994e-17	2.464871e-17	2.987749e-17	3.510627e-17	5.040263e-17	6.569900e-17	8.733634e-17	1.153147e-16	1.432930e-16	1.931585e-16	2.430240e-16	3.108895e-16	3.967551e-16	4.826206e-16	6.116910e-16	7.683781e-16	9.576918e-16	1.185624e-15	1.459149e-15	1.811890e-15	2.247082e-15	2.801198e-15	3.526263e-15	4.475117e-15	5.804032e-15	7.702867e-15	1.051303e-14	1.481435e-14	2.160581e-14	3.263156e-14	5.097219e-14	8.211700e-14	1.357662e-13	2.290320e-13	3.913719e-13	6.705094e-13	1.134291e-12	1.852230e-12	2.827543e-12	3.878729e-12	4.605854e-12	4.620880e-12	3.862496e-12	2.693676e-12	1.620607e-12	9.132325e-13	5.082647e-13	2.846723e-13	1.612558e-13	9.244126e-14	5.359730e-14	3.140642e-14	1.858823e-14	1.110923e-14	6.705320e-15	4.090281e-15	2.525521e-15	1.582867e-15	1.012083e-15	6.660340e-16	4.580174e-16	3.373451e-16	2.755786e-16	2.623306e-16	2.755786e-16	3.373451e-16	4.580174e-16	6.660340e-16	1.012083e-15	1.582867e-15	2.525521e-15	4.090281e-15	6.705320e-15	1.110923e-14	1.858823e-14	3.140642e-14	5.359730e-14	9.244126e-14	1.612558e-13	2.846723e-13	5.082647e-13	9.132325e-13	1.620607e-12	2.693676e-12	3.862496e-12	4.620880e-12	4.605854e-12	3.878729e-12	2.827543e-12	1.852230e-12	1.134291e-12	6.705094e-13	3.913719e-13	2.290320e-13	1.357662e-13	8.211700e-14	5.097219e-14	3.263156e-14	2.160581e-14	1.481435e-14	1.051303e-14	7.702867e-15	5.804032e-15	4.475117e-15	3.526263e-15	2.801198e-15	2.247082e-15	1.811890e-15	1.459149e-15	1.185624e-15	9.576918e-16	7.683781e-16	6.116910e-16	4.826206e-16	3.967551e-16	3.108895e-16	2.430240e-16	1.931585e-16	1.432930e-16	1.153147e-16	8.733634e-17	6.569900e-17	5.040263e-17	3.510627e-17	2.987749e-17	2.464871e-17	1.941994e-17	1.419116e-17	8.962385e-18	7.568047e-18	6.173708e-18	4.779370e-18	3.385032e-18	1.990693e-18	1.759940e-18	1.529187e-18	1.298433e-18	1.067680e-18	8.369264e-19	6.061729e-19	3.754195e-19	2.447734e-19	2.142344e-19	1.836955e-19	1.531566e-19	1.226177e-19	9.207877e-20	6.153985e-20	3.100093e-20	2.732249e-20	2.364406e-20	1.996562e-20	1.628719e-20	1.260875e-20	8.930316e-21	5.251880e-21	3.282935e-21	3.023479e-21	2.764024e-21	2.504569e-21	2.245113e-21	1.985658e-21	1.726202e-21	1.466747e-21	
7.343616e-22	8.280182e-22	9.216747e-22	1.015331e-21	1.108988e-21	1.202644e-21	1.296301e-21	1.389957e-21	2.201566e-21	3.731128e-21	5.260689e-21	6.790250e-21	8.319812e-21	9.849373e-21	1.137893e-20	1.290850e-20	2.552399e-20	3.813948e-20	5.075497e-20	6.337046e-20	7.598595e-20	8.860144e-20	1.012169e-19	1.549550e-19	2.498157e-19	3.446763e-19	4.395370e-19	5.343976e-19	6.292583e-19	7.241189e-19	8.189796e-19	1.388615e-18	1.958250e-18	2.527885e-18	3.097520e-18	3.667155e-18	5.791335e-18	7.915515e-18	1.003970e-17	1.216388e-17	1.428806e-17	2.045313e-17	2.661820e-17	3.531279e-17	4.653689e-17	5.776099e-17	7.768569e-17	9.761039e-17	1.246847e-16	1.589085e-16	1.931324e-16	2.445201e-16	3.069393e-16	3.824677e-16	4.736181e-16	5.833394e-16	7.258193e-16	9.028669e-16	1.130497e-15	1.432066e-15	1.831836e-15	2.400990e-15	3.228086e-15	4.473991e-15	6.416069e-15	9.540476e-15	1.471307e-14	2.349966e-14	3.877098e-14	6.582264e-14	1.144641e-13	2.027817e-13	3.630501e-13	6.483701e-13	1.129826e-12	1.851944e-12	2.703427e-12	3.318206e-12	3.368511e-12	2.802728e-12	1.862479e-12	1.000191e-12	5.169464e-13	2.723545e-13	1.471874e-13	8.135353e-14	4.581959e-14	2.621841e-14	1.520921e-14	8.931448e-15	5.305043e-15	3.186428e-15	1.936237e-15	1.191877e-15	7.452276e-16	4.756242e-16	3.125695e-16	2.147348e-16	1.580550e-16	1.290679e-16	1.228529e-16	1.290679e-16	1.580550e-16	2.147348e-16	3.125695e-16	4.756242e-16	7.452276e-16	1.191877e-15	1.936237e-15	3.186428e-15	5.305043e-15	8.931448e-15	1.520921e-14	2.621841e-14	4.581959e-14	8.135353e-14	1.471874e-13	2.723545e-13	5.169464e-13	1.000191e-12	1.862479e-12	2.802728e-12	3.368511e-12	3.318206e-12	2.703427e-12	1.851944e-12	1.129826e-12	6.483701e-13	3.630501e-13	2.027817e-13	1.144641e-13	6.582264e-14	3.877098e-14	2.349966e-14	1.471307e-14	9.540476e-15	6.416069e-15	4.473991e-15	3.228086e-15	2.400990e-15	1.831836e-15	1.432066e-15	1.130497e-15	9.028669e-16	7.258193e-16	5.833394e-16	4.736181e-16	3.824677e-16	3.069393e-16	2.445201e-16	1.931324e-16	1.589085e-16	1.246847e-16	9.761039e-17	7.768569e-17	5.776099e-17	4.653689e-17	3.531279e-17	2.661820e-17	2.045313e-17	1.428806e-17	1.216388e-17	1.003970e-17	7.915515e-18	5.791335e-18	3.667155e-18	3.097520e-18	2.527885e-18	1.958250e-18	1.388615e-18	8.189796e-19	7.241189e-19	6.292583e-19	5.343976e-19	4.395370e-19	3.446763e-19	2.498157e-19	1.549550e-19	1.012169e-19	8.860144e-20	7.598595e-20	6.337046e-20	5.075497e-20	3.813948e-20	2.552399e-20	1.290850e-20	1.137893e-20	9.849373e-21	8.319812e-21	6.790250e-21	5.260689e-21	3.731128e-21	2.201566e-21	1.389957e-21	1.296301e-21	1.202644e-21	1.108988e-21	1.015331e-21	9.216747e-22	8.280182e-22	7.343616e-22	
3.381344e-22	3.717782e-22	4.054221e-22	4.390659e-22	4.727097e-22	5.063535e-22	5.399973e-22	5.736412e-22	9.019926e-22	1.525052e-21	2.148110e-21	2.771169e-21	3.394228e-21	4.017287e-21	4.640346e-21	5.263405e-21	1.037911e-20	1.549482e-20	2.061052e-20	2.572622e-20	3.084193e-20	3.595763e-20	4.107334e-20	6.280286e-20	1.011462e-19	1.394895e-19	1.778328e-19	2.161762e-19	2.545195e-19	2.928628e-19	3.312062e-19	5.604908e-19	7.897754e-19	1.019060e-18	1.248345e-18	1.477629e-18	2.329467e-18	3.181305e-18	4.033142e-18	4.884980e-18	5.736818e-18	8.195722e-18	1.065463e-17	1.411530e-17	1.857774e-17	2.304017e-17	3.094040e-17	3.884063e-17	4.956509e-17	6.311379e-17	7.666249e-17	9.699358e-17	1.217021e-16	1.516350e-16	1.878251e-16	2.314911e-16	2.884858e-16	3.596818e-16	4.518661e-16	5.750828e-16	7.399212e-16	9.773072e-16	1.326334e-15	1.858541e-15	2.698641e-15	4.068057e-15	6.367357e-15	1.033511e-14	1.735944e-14	3.009693e-14	5.371527e-14	9.843175e-14	1.845120e-13	3.514002e-13	6.703283e-13	1.241643e-12	2.080800e-12	2.720017e-12	2.798810e-12	2.321962e-12	1.428361e-12	5.783030e-13	2.666680e-13	1.330479e-13	6.974721e-14	3.781915e-14	2.102307e-14	1.191613e-14	6.863474e-15	4.008464e-15	2.370725e-15	1.419136e-15	8.600249e-16	5.282747e-16	3.297544e-16	2.101845e-16	1.379918e-16	9.473114e-17	6.969169e-17	5.689369e-17	5.415048e-17	5.689369e-17	6.969169e-17	9.473114e-17	1.379918e-16	2.101845e-16	3.297544e-16	5.282747e-16	8.600249e-16	1.419136e-15	2.370725e-15	4.008464e-15	6.863474e-15	1.191613e-14	2.102307e-14	3.781915e-14	6.974721e-14	1.330479e-13	2.666680e-13	5.783030e-13	1.428361e-12	2.321962e-12	2.798810e-12	2.720017e-12	2.080800e-12	1.241643e-12	6.703283e-13	3.514002e-13	1.845120e-13	9.843175e-14	5.371527e-14	3.009693e-14	1.735944e-14	1.033511e-14	6.367357e-15	4.068057e-15	2.698641e-15	1.858541e-15	1.326334e-15	9.773072e-16	7.399212e-16	5.750828e-16	4.518661e-16	3.596818e-16	2.884858e-16	2.314911e-16	1.878251e-16	1.516350e-16	1.217021e-16	9.699358e-17	7.666249e-17	6.311379e-17	4.956509e-17	3.884063e-17	3.094040e-17	2.304017e-17	1.857774e-17	1.411530e-17	1.065463e-17	8.195722e-18	5.736818e-18	4.884980e-18	4.033142e-18	3.181305e-18	2.329467e-18	1.477629e-18	1.248345e-18	1.019060e-18	7.897754e-19	5.604908e-19	3.312062e-19	2.928628e-19	2.545195e-19	2.161762e-19	1.778328e-19	1.394895e-19	1.011462e-19	6.280286e-20	4.107334e-20	3.595763e-20	3.084193e-20	2.572622e-20	2.061052e-20	1.549482e-20	1.037911e-20	5.263405e-21	4.640346e-21	4.017287e-21	3.394228e-21	2.771169e-21	2.148110e-21	1.525052e-21	9.019926e-22	5.736412e-22	5.399973e-22	5.063535e-22	4.727097e-22	4.390659e-22	4.054221e-22	3.717782e-22	3.381344e-22	
1.318191e-22	1.449406e-22	1.580621e-22	1.711836e-22	1.843051e-22	1.974265e-22	2.105480e-22	2.236695e-22	3.517019e-22	5.946452e-22	8.375885e-22	1.080532e-21	1.323475e-21	1.566418e-21	1.809362e-21	2.052305e-21	4.047036e-21	6.041766e-21	8.036497e-21	1.003123e-20	1.202596e-20	1.402069e-20	1.601542e-20	2.448830e-20	3.943934e-20	5.439037e-20	6.934141e-20	8.429244e-20	9.924347e-20	1.141945e-19	1.291455e-19	2.185499e-19	3.079543e-19	3.973586e-19	4.867630e-19	5.761673e-19	9.083236e-19	1.240480e-18	1.572636e-18	1.904792e-18	2.236949e-18	3.195750e-18	4.154552e-18	5.503975e-18	7.244018e-18	8.984061e-18	1.206461e-17	1.514516e-17	1.932697e-17	2.461005e-17	2.989313e-17	3.782091e-17	4.745564e-17	5.912762e-17	7.323964e-17	9.026698e-17	1.124925e-16	1.402569e-16	1.762085e-16	2.242678e-16	2.885704e-16	3.811965e-16	5.174351e-16	7.252985e-16	1.053716e-15	1.589839e-15	2.492106e-15	4.054938e-15	6.838588e-15	1.193668e-14	2.154553e-14	4.023845e-14	7.790745e-14	1.569377e-13	3.309053e-13	7.390509e-13	1.825154e-12	2.720626e-12	2.799437e-12	2.322482e-12	1.428681e-12	2.213428e-13	1.029071e-13	5.152780e-14	2.705875e-14	1.468495e-14	8.166912e-15	4.630271e-15	2.667325e-15	1.557917e-15	9.214401e-16	5.515964e-16	3.342835e-16	2.053372e-16	1.281741e-16	8.169803e-17	5.363701e-17	3.682172e-17	2.708895e-17	2.211440e-17	2.104812e-17	2.211440e-17	2.708895e-17	3.682172e-17	5.363701e-17	8.169803e-17	1.281741e-16	2.053372e-16	3.342835e-16	5.515964e-16	9.214401e-16	1.557917e-15	2.667325e-15	4.630271e-15	8.166912e-15	1.468495e-14	2.705875e-14	5.152780e-14	1.029071e-13	2.213428e-13	1.428681e-12	2.322482e-12	2.799437e-12	2.720626e-12	1.825154e-12	7.390509e-13	3.309053e-13	1.569377e-13	7.790745e-14	4.023845e-14	2.154553e-14	1.193668e-14	6.838588e-15	4.054938e-15	2.492106e-15	1.589839e-15	1.053716e-15	7.252985e-16	5.174351e-16	3.811965e-16	2.885704e-16	2.242678e-16	1.762085e-16	1.402569e-16	1.124925e-16	9.026698e-17	7.323964e-17	5.912762e-17	4.745564e-17	3.782091e-17	2.989313e-17	2.461005e-17	1.932697e-17	1.514516e-17	1.206461e-17	8.984061e-18	7.244018e-18	5.503975e-18	4.154552e-18	3.195750e-18	2.236949e-18	1.904792e-18	1.572636e-18	1.240480e-18	9.083236e-19	5.761673e-19	4.867630e-19	3.973586e-19	3.079543e-19	2.185499e-19	1.291455e-19	1.141945e-19	9.924347e-20	8.429244e-20	6.934141e-20	5.439037e-20	3.943934e-20	2.448830e-20	1.601542e-20	1.402069e-20	1.202596e-20	1.003123e-20	8.036497e-21	6.041766e-21	4.047036e-21	2.052305e-21	1.809362e-21	1.566418e-21	1.323475e-21	1.080532e-21	8.375885e-22	5.946452e-22	3.517019e-22	2.236695e-22	2.105480e-22	1.974265e-22	1.843051e-22	1.711836e-22	1.580621e-22	1.449406e-22	1.318191e-22